Patents/Inventors

Christopher Kimball

San Jose, CAUS9 patents

8 Patents

US125623502026
Moveable Edge Rings for Plasma Processing Systems
LAM RESEARCH CORPORATION
0 cites
US125487372026
Polymeric Coating for Semiconductor Processing Chamber Components
Lam Research Corporation
0 cites
US124513352025
Multi-plate Electrostatic Chucks with Ceramic Baseplates
Lam Research Corporation
0 cites
US124445702025
Electrostatic Chuck Heater Resistance Measurement to Approximate Temperature
Lam Research Corporation
0 cites
US121295692024
Method for Conditioning Semiconductor Processing Chamber Components
Lam Research Corporation
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US119675172024
Electrostatic Chuck with Ceramic Monolithic Body
Lam Research Corporation
0 cites
US119357762024
Electrostatically Clamped Edge Ring
Lam Research Corporation
0 cites
US118481772023
Multi-plate Electrostatic Chucks with Ceramic Baseplates
Lam Research Corporation
0 cites