Christopher A. Rowland

5 Patents

• US125371652026

  Adjustable Exit Angle Source for Ions and Neutral Particles

  Applied Materials, Inc.

  0 cites
• US121069362024

  Scanned Angled Etching Apparatus and Techniques Providing Separate Co-linear Radicals and Ions

  Applied Materials, Inc.

  0 cites
• US118624332024

  System and Methods Using an Inline Surface Engineering Source

  Varlan Semiconductor Equipment Associates, Inc.

  0 cites
• US117156212023

  Scanned Angled Etching Apparatus and Techniques Providing Separate Co-linear Radicals and Ions

  APPLIED Materials, Inc.

  0 cites
• US115748002023

  Extreme Edge Uniformity Control

  Varian Semiconductor Equipment Associates, Inc.

  0 cites