Patents/Inventors

Christoph Spengler

ViennaAT5 patents

6 Patents

US126146952026
Multi-beam Pattern Definition Device
IMS Nanofabrication GmbH
0 cites
US125000602025
Electromagnetic Lens
IMS Nanofabrication GmbH
0 cites
US124812142025
Correction of Blur Variation in a Multi-beam Writer
IMS Nanofabrication GmbH
0 cites
US120401572024
Pattern Data Processing for Programmable Direct-write Apparatus
IMS Nanofabrication GmbH
0 cites
US117353912023
Charged-particle Source
IMS Nanofabrication GmbH
0 cites
US115690642023
Method for Irradiating a Target Using Restricted Placement Grids
IMS Nanofabrication GmbH
0 cites