9 Patents
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- US119125632024Micromechanical Component and Method for Manufacturing a Micromechanical Component
ROBERT BOSCH GmbH
0 cites - US119125652024Micromechanical Sensor Unit and Method for Manufacturing a Micromechanical Sensor Unit
ROBERT BOSCH GmbH
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- US118404452023MEMS Sensor Including a Diaphragm and Method for Manufacturing a MEMS Sensor
ROBERT BOSCH GmbH
0 cites - US115549522023Method for Closing Openings in a Flexible Diaphragm of a MEMS Element
Robert Bosch GmbH
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