8 Patents
- US126092822026Multi-beam Charged Particle System and Method of Controlling the Working Distance in a Multi-beam Charged Particle System
Carl Zeiss Multisem GmbH
0 cites - US125867492026Certain Improvements of Multi-beam Generating and Multi-beam Deflecting Units
Carl Zeiss Multisem GmbH
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- US122834572025Multiple Particle Beam Microscope and Associated Method with an Improved Focus Setting Taking Into Account an Image Plane Tilt
Carl Zeiss Multisem GmbH
0 cites - 0 cites
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- US116457402023Method for Detector Equalization During the Imaging of Objects with a Multi-beam Particle Microscope
Carl Zeiss Multisem GmbH
0 cites - 0 cites