Patents/Inventors

Christof Baur

OberkochenDE24 patents

15 Patents

US126019682026
Method and Apparatus for Processing a Sample
Carl Zeiss SMT GmbH
0 cites
US124932382025
Method, Device and Computer Program for Repairing a Mask Defect
Carl Zeiss SMT GmbH
0 cites
US124052892025
Device and Method for Operating a Bending Beam in a Closed Control Loop
Carl Zeiss SMT GmbH
0 cites
US122926802025
Method and Apparatuses for Disposing of Excess Material of a Photolithographic Mask
Carl Zeiss SMT GmbH
0 cites
US121642262024
Method and Apparatuses for Disposing of Excess Material of a Photolithographic Mask
Carl Zeiss SMT GmbH
0 cites
US119770972024
Methods and Devices for Extending a Time Period Until Changing a Measuring Tip of a Scanning Probe Microscope
Carl Zeiss SMT GmbH
0 cites
US119659102024
Device and Method for Operating a Bending Beam in a Closed Control Loop
Carl Zeiss SMT GmbH
0 cites
US118993592024
Method and Apparatus for Removing a Particle from a Photolithographic Mask
Carl Zeiss SMT GmbH
0 cites
US118861262024
Apparatus and Method for Removing a Single Particulate from a Substrate
Carl Zeiss SMT GmbH
0 cites
US118745982024
Method and Apparatuses for Disposing of Excess Material of a Photolithographic Mask
Carl Zeiss SMT GmbH
0 cites
US117965632023
Apparatus and Method for a Scanning Probe Microscope
Carl Zeiss SMT GmbH
0 cites
US117331862023
Device and Method for Analyzing a Defect of a Photolithographic Mask or of a Wafer
Carl Zeiss SMT GmbH
0 cites
US116809632023
Method and Apparatus for Examining a Measuring Tip of a Scanning Probe Microscope
Carl Zeiss SMT GmbH
0 cites
US116301242023
Device and Method for Operating a Bending Beam in a Closed Control Loop
Carl Zeiss SMT GmbH
0 cites
US115924612023
Apparatus and Method for Examining And/or Processing a Sample
Carl Zeiss SMT GmbH
0 cites