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Christina Lynn Porter
Veldhoven
NL
1 patent
2 Patents
US12474267
2025
Wavefront Metrology Sensor and Mask Therefor, Method for Optimizing a Mask and Associated Apparatuses
ASML Netherlands B.V.
0 cites
US12044951
2024
Illumination Source and Associated Metrology Apparatus
ASML Netherlands B.V.
0 cites