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Inventors
Christianus Wilhelmus Johannes Berendsen
Veldhoven
NL
7 patents
6 Patents
US12566382
2026
Fluid Handling System, Method and Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US12429778
2025
Fluid Handling System, Method and Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US12389519
2025
Guiding Device and Associated System
ASML NETHERLANDS B.V.
0 cites
US12287580
2025
Fluid Handling System, Method and Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US11822252
2023
Guiding Device and Associated System
ASML NETHERLANDS B.V.
0 cites
US11720032
2023
Process Tool and an Inspection Method
ASML NETHERLANDS B.V.
0 cites