Patents/Inventors

Christian Pfahler

UlmDE2 patents

3 Patents

US124761512025
Preheat Processes for Millisecond Anneal System
Mattson Technology, Inc.
0 cites
US120274272024
Preheat Processes for Millisecond Anneal System
Beijing E-town Semiconductor Technology Co., Ltd.
0 cites
US120149202024
Apparatus for Hydrogen Assisted Atmospheric Radical Oxidation
Beijing E-town Semiconductor Technology Co., Ltd.
0 cites