2 Patents
- US121519352024Micromechanical Structure, Micromechanical System and Method of Providing a Micromechanical Structure
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v.
0 cites - US120713382024Micromechanical Structure and Method of Providing the Same
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.
0 cites