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Inventors
Choong Hyun Lee
Suwon-si
KR
3 patents
3 Patents
US12532460
2026
Semiconductor Memory Device
Samsung Electronics Co., Ltd.
0 cites
US12249536
2025
Substrate Supporting Assembly and Substrate Processing Apparatus
WONIK IPS CO., Ltd.
0 cites
US11804371
2023
Substrate Treatment Apparatus and Method of Performing Treatment Process on Substrate
SEMES CO., Ltd.
0 cites