Patents/Inventors

Chiyan Kuan

Danville, CAUS7 patents

3 Patents

US126205492026
Dynamic Determination of a Sample Inspection Recipe of Charged Particle Beam Inspection
ASML Netherlands B.V.
0 cites
US121424512024
System for Inspecting and Grounding a Mask in a Charged Particle System
ASML Netherlands B.V.
0 cites
US116623232023
Method and System for Inspecting an EUV Mask
ASML Netherlands B.V.
0 cites