Patents/Inventors

Ching-yu Chang

HsinchuTW119 patents

120 Patents

US126191542026
Lithography Techniques for Reducing Defects
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US126191482026
Crosslinkable Photoresist for Extreme Ultraviolet Lithography
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US126134682026
Method for Forming Patterned Photoresist
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US126079372026
Photoresist Top Coating Material for Etching Rate Control
Taiwan Semiconductor Manufacturing Co., Ltd.
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US126107892026
Method of Manufacturing a Semiconductor Device and Pattern Formation Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
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US126019752026
Compositions for Reducing Resist Consumption of Extreme Ultraviolet Metallic Type Resist
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US125786402026
Photosensitive Material for Photoresist and Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
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US125786412026
Photoresist and Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125786452026
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125663742026
Photoresist Composition and Method of Manufacturing Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125575722026
Method for Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125470752026
Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125506852026
Protective Composition and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125411492026
Resist Dispensing System and Method of Use
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125357392026
Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125357382026
Photoresist Top Coating Material for Etching Rate Control
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US125326872026
Cleaning Solution and Method of Cleaning Wafer
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125108212025
Photoresist Composition and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125046932025
Photoresist Composition and Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US125000842025
Semiconductor Manufacturing Apparatus and Method of Manufacturing Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124875272025
Photoresist Developer and Method of Developing Photoresist
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124761072025
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124762102025
Bump Structure and Method of Manufacturing Bump Structure
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124696922025
Cleaning Solution and Method of Cleaning Wafer
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124630342025
Photoresist Layer Surface Treatment, Cap Layer, and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124364582025
Photoresist Composition and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124379922025
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US124008752025
Film Deposition for Patterning Process
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123796592025
Photoresist Composition and Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123746392025
Non-dmso Stripper for Advance Package Metal Plating Process
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123604562025
EUV Metallic Resist Performance Enhancement via Additives
TAIWAN SEMICONDUCTOR MANUFACTURING CO., TLD.
0 cites
US123548742025
Method of Manufacturing Semiconductor Devices and Pattern Formation Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123476832025
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123477272025
Treatment of Spin on Organic Material to Improve Wet Resistance
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123410112025
Method for Forming and Using Mask
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123225902025
Semiconductor Device and Method
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123157262025
Semiconductor Device and Method
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US123005072025
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123004872025
Photoresist Composition and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122926842025
Adhesion Layer for Multi-layer Photoresist
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US122725542025
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122711132025
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122538002025
EUV Metallic Resist Performance Enhancement via Additives
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US122495072025
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122226532025
Method for Forming Semiconductor Structure
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122226542025
Lithography Method for Positive Tone Development
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US122226502025
Photoresist Underlayer and Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACURING COMPANY, Ltd.
0 cites
US122226472025
Photoresist Composition and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122226432025
Method of Manufacturing a Semiconductor Device and Pattern Formation Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122179712025
Method for Forming Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122116982025
Method Composition and Methods Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US122102832025
EUV Photoresist with Low-activation-energy Ligands or High-developer-solubility Ligands
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US122102862025
Metal-compound-removing Solvent and Method in Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US121892872025
Photoresist Composition and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121892962025
Lithography Process and Material for Negative Tone Development
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US121892932025
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121817982024
Extreme Ultraviolet Photolithography Method with Developer Composition
TAIWAIN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US121745402024
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121597872024
Method of Manufacturing a Semiconductor Device and Pattern Formation Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121486102024
Spin on Carbon Composition and Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121346902024
Photoresist Composition and Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121355012024
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121355022024
Resin, Photoresist Composition, and Method of Manufacturing Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121069612024
Humidity Control or Aqueous Treatment for EUV Metallic Resist
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120858552024
Resin, Photoresist Composition, and Method of Manufacturing Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120876162024
Air Gap Formation Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120876442024
Methods of Determining Process Recipes and Forming a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US120740252024
Photoresist Developer and Method of Developing Photoresist
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120740272024
Underlayer of Multilayer Structure and Methods of Use Thereof
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120740582024
Patterning Methods for Semiconductor Devices
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120573152024
Photoresist Layer Surface Treatment, Cap Layer, and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120504042024
Photoresist with Polar-acid-labile-group
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US120259202024
Lithography Techniques for Reducing Defects
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120193752024
Photosensitive Material and Method of Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US120092102024
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120027102024
Semiconductor Structure and Methods of Forming the Same
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US119843162024
Porogen Bonded Gap Filling Material in Semiconductor Manufacturing
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119716572024
Photoresist Developer and Method of Developing Photoresist
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119716592024
Photoresist Composition and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
USD10243522024
Bio Particle Application Device
0 cites
US119661622024
Photoresist Composition and Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119553362024
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119487982024
Semiconductor Device and Method
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US119423222024
Method of Manufacturing Semiconductor Devices and Pattern Formation Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119357572024
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119341012024
Photoresist Composition and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119233262024
Bump Structure and Method of Manufacturing Bump Structure
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119143012024
Photoresist, Method of Manufacturing a Semiconductor Device and Method of Extreme Ultraviolet Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118878512024
Method for Forming and Using Mask
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US118861212024
Method for Forming Patterned Photoresist
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US118760542024
Overlay Mark and Method of Making
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118547692023
Adjustable Fastening Device for Plasma Gas Injectors
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US118547982023
Semiconductor Device and Method
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US118222512023
Photoresist with Polar-acid-labile-group
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US118222372023
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118222382023
Extreme Ultraviolet Photolithography Method with Developer Composition
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117969182023
Underlayer Material for Photoresist
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117840462023
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117823452023
Bottom Antireflective Coating Materials
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117748552023
Lithography Patterning Technique
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117622962023
Method and Apparatus of Patterning a Semiconductor Device
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US117549232023
Resist Dispensing System and Method of Use
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117281612023
Spin on Carbon Composition and Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117143552023
Photoresist Composition and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117084952023
Priming Material for Substrate Coating
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117053322023
Photoresist Layer Surface Treatment, Cap Layer, and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117037662023
Materials and Methods for Forming Resist Bottom Layer
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117037652023
Photoresist Composition and Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116948962023
Photoresist Developer and Method of Developing Photoresist
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116812262023
Metal-compound-removing Solvent and Method in Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116812212023
EUV Photoresist with Low-activation-energy Ligands or High-developer-solubility Ligands
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116768522023
Patterning Methods for Semiconductor Devices
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116704902023
Integrated Circuit Fabrication System with Adjustable Gas Injector
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116565532023
Method for Forming Semiconductor Structure
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116581202023
Porogen Bonded Gap Filling Material in Semiconductor Manufacturing
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116262852023
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116262932023
Method of Manufacturing a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116055382023
Protective Composition and Method of Forming Photoresist Pattern
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US115812172023
Method for Forming Vias and Method for Forming Contacts in Vias
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115502202023
Negative Tone Photoresist for EUV Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites