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Inventors
Ching-liang Yi
Hsinchu County
TW
3 patents
4 Patents
US12421600
2025
2-in-1 (uv-assisted and Plasma Enhanced) ALD and ALE Chamber
SKY TECH Inc.
0 cites
US12264817
2025
Manufacturing Method of Optical Device, Optical Device with Quantum Dots, and Illumination Apparatus with Quantum Dots
QDLUX Inc.
0 cites
US12224159
2025
Gas Mixing Method to Enhance Plasma
SKY TECH Inc.
0 cites
US12006571
2024
Atomic Layer Deposition Apparatus for Coating on Fine Powders
SKY TECH Inc.
0 cites