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Inventors
Chih-yin Kuo
Hsinchu
TW
1 patent
2 Patents
US12142666
2024
Semiconductor Device Having a Gate Structure with Different Lengths Between Laterally Etched Spacers
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US11705502
2023
Method for Laterally Etching Gate Spacers
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites