Chih-ching Cheng

5 Patents

• US123343142025

  Dry Etcher Uniformity Control by Tuning Edge Zone Plasma Sheath

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US122058442025

  Plasma Control Method in Semiconductor Wafer Fabrication

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US121424942024

  Small Gas Flow Monitoring of Dry Etcher by OES Signal

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US119933012024

  Unlocking Device with Pause Function

  UNIQUE PRODUCT & DESIGN CO., Ltd.

  0 cites
• US118272652023

  Movable Carrier and Folding Method Therefor

  UNIQUE PRODUCT & DESIGN CO., Ltd.

  0 cites