Patents/Inventors

Chih-chiang Tu

HsinchuTW10 patents

10 Patents

US125324002026
EUV Source with Rotation Crucible and Laser and Tin (SN) Auto-filling Method
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US124875312025
Extreme Ultraviolet (EUV) Radiation Source Apparatus, EUV Lithography System, and Method for Generating Extreme Ultraviolet Radiation
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US121762112024
Reflection Mode Photomask
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121241632024
Mask Defect Prevention
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US120667572024
Mask and Method of Forming the Same
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US120136322024
Pellicle Having Vent Hole
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd
0 cites
US118605302024
Mask Defect Prevention
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US118548612023
System and Method for Performing Spin Dry Etching
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117354212023
Reflection Mode Photomask and Method of Making
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116626562023
Mask and Method of Forming the Same
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites