Patents/Inventors

Chien-teh Kao

Sunnyvale, CAUS3 patents

4 Patents

US123945952025
Multi-antenna Unit for Large Area Inductively Coupled Plasma Processing Apparatus
Applied Materials, Inc.
0 cites
US123621492025
Film Stress Control for Plasma Enhanced Chemical Vapor Deposition
Applied Materials, Inc.
0 cites
US118547712023
Film Stress Control for Plasma Enhanced Chemical Vapor Deposition
APPLIED MATERIALS, Inc.
0 cites
US116642162023
ALD Process and Hardware with Improved Purge Efficiency
APPLIED MATERIALS, Inc.
0 cites