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Inventors
Chia-ying Tien
Hsinchu
TW
3 patents
3 Patents
US12589465
2026
Platen Rotation Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US12090602
2024
Platen Rotation Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US11679468
2023
Chemical-mechanical Polishing System and Method
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites