10 Patents
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- US121675252024EUV Light Source and Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
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- US118323722023EUV Light Source and Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
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- US116447592023Droplet Generator and Method of Servicing Extreme Ultraviolet Radiation Source Apparatus
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
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