Chi-ming Lu

3 Patents

• US125574012026

  Method of Forming Deep Trench Isolation in Radiation Sensing Substrate and Image Sensor Device

  TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.

  0 cites
• US121426282024

  Method of Forming Semiconductor Device

  TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd

  0 cites
• US118549802023

  Method for Forming Titanium Nitride Barrier with Small Surface Grains in Interconnects

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites