Patents/Inventors

Chi-lun Lu

HsinchuTW3 patents

4 Patents

US124932372025
EUV Pellicle and Mounting Method Thereof on Photo Mask
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123531202025
EUV Photo Masks and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US122769062025
Methods for Cleaning Lithography Mask
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118222302023
EUV Pellicle and Mounting Method Thereof on Photo Mask
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites