Chi-hsiang Shen

10 Patents

• US125819152026

  Apparatus and Methods for Chemical Mechanical Polishing

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US125687862026

  Processing Tool and Method

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US125506952026

  Methods of Forming an Abrasive Slurry and Methods for Chemical-mechanical Polishing

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US125086852025

  Semiconductor Device Fabrication Methods and Devices for Forming the Same

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US122241792025

  Metal Heterojunction Structure with Capping Metal Layer

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US120026842024

  Methods for Chemical Mechanical Polishing and Forming Interconnect Structure

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites
• US117722282023

  Chemical Mechanical Polishing Apparatus Including a Multi-zone Platen

  TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.

  0 cites
• US116580652023

  Chemical Mechanical Polishing Slurry Composition, Method for Chemical Mechanical Polishing and Method for Forming Connecting Structure

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites
• US116338292023

  External Heating System for Use in Chemical Mechanical Polishing System

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US116370212023

  Metal Heterojunction Structure with Capping Metal Layer

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites