Chenhua Lu

3 Patents

• US125730192026

  Electroplating Chamber Leakage Plating Warning Method and System

  ACM RESEARCH (SHANGHAI), Inc.

  0 cites
• US124865902025

  Substrate Processing Method

  ACM RESEARCH (SHANGHAI), Inc.

  0 cites
• US118593032024

  Plating Apparatus

  ACM RESEARCH (SHANGHAI), Inc.

  0 cites