Patents/Inventors

Chenghao Wu

Berkeley, CAUS17 patents

7 Patents

US126019742026
Bake Strategies to Enhance Lithographic Performance of Metal-containing Resist
Lam Research Corporation
0 cites
US125851842026
Photoresist with Multiple Patterning Radiation-absorbing Elements And/or Vertical Composition Gradient
Lam Research Corporation
0 cites
US125774662026
Photoresist Development with Organic Vapor
Lam Research Corporation
0 cites
US125527122026
Modified Dolomite Powder, Preparation Method Thereof and Concrete
CHINA TIESIJU CIVIL ENGINEERING GROUP CO., Ltd.
0 cites
US124364642025
Pre-exposure Photoresist Curing to Enhance EUV Lithographic Performance
Lam Research Corporation
0 cites
US122116912025
Dry Development of Resists
Lam Research Corporation
0 cites
US119214272024
Methods for Making Hard Masks Useful in Next-generation Lithography
Lam Research Corporation
0 cites