Patents/Inventors

Chen-wei Liang

El Cerrito, CAUS3 patents

4 Patents

US122939192025
Alternating Etch and Passivation Process
Lam Research Corporation
0 cites
US120625382024
Atomic Layer Etch and Selective Deposition Process for Extreme Ultraviolet Lithography Resist Improvement
Lam Research Corporation
0 cites
US118482122023
Alternating Etch and Passivation Process
Lam Research Corporation
0 cites
US115519382023
Alternating Etch and Passivation Process
Lam Research Corporation
0 cites