3 Patents
- US123659862025Remote Capacitively Coupled Plasma Deposition of Amorphous Silicon
APPLIED MATERIALS, Inc.
0 cites - US120091852024Semiconductor Processing Apparatus Having Improved Temperature Control
APPLIED MATERIALS, Inc.
0 cites - US116996032023Thermal Processing System with Temperature Non-uniformity Control
MATTSON TECHNOLOGY, Inc.
0 cites