Patents/Inventors

Chawon Koh

Yongin-siKR3 patents

4 Patents

US123604512025
Method of Manufacturing Semiconductor Device
INHA Industry Partnership Institute
0 cites
US121129482024
Method of Manufacturing Integrated Circuit Device Using a Metal-containing Photoresist Composition
Tokyo Ohka Kogyo Co., Ltd.
0 cites
US119232092024
Substrate Processing Apparatus and Substrate Processing Method
Samsung Electronics Co., Ltd.
0 cites
US115990212023
Photoresist Compositions and Methods for Fabricating Semiconductor Devices Using the Same
Inpria Corporation
0 cites