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Inventors
Charles Schlechte
Austin, TX
US
7 patents
3 Patents
US12620555
2026
Systems and Methods for Plasma Process
TOKYO ELECTRON LIMITED
0 cites
US12387910
2025
Plasma Processing with Broadband RF Waveforms
Tokyo Electron Limited
0 cites
US12020902
2024
Plasma Processing with Broadband RF Waveforms
Tokyo Electron Limited
0 cites