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Inventors
Changyun Lee
Hwaseong-si
KR
4 patents
3 Patents
US12512298
2025
Plasma Processing Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US12016109
2024
Plasma Generator
Samsung Electronics Co., Ltd.
0 cites
US11984297
2024
Plasma Control Device and Plasma Processing System
SAMSUNG ELECTRONICS CO., Ltd.
0 cites