Patents/Inventors

Changyou Jing

Livermore, CAUS7 patents

6 Patents

US124445702025
Electrostatic Chuck Heater Resistance Measurement to Approximate Temperature
Lam Research Corporation
0 cites
US123082652025
RF Immune Sensor Probe for Monitoring a Temperature of an Electrostatic Chuck of a Substrate Processing System
Lam Research Corporation
0 cites
US121658912024
Identification of and Compensation for a Failure in a Heater Array
Lam Research Corporation
0 cites
US121424642024
In Situ Real-time Sensing and Compensation of Non-uniformities in Substrate Processing Systems
LAM RESEARCH CORPORATION
0 cites
US119019442024
Power and Data Transmission to Substrate Support in Plasma Chambers via Optical Fiber
LAM RESEARCH CORPORATION
0 cites
US118238752023
Real-time Control of Temperature in a Plasma Chamber
Lam Research Corporation
0 cites