6 Patents
- US125470812026Illumination Compensation Method
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US121743222024F-P Sensor Probe, Absolute Distance Measurement Device, and Absolute Distance Measurement Method
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US121001882024Template Mark Detection Method and Template Position Correction Method Based on Single Camera
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US120858462024Method for Inverse Optical Proximity Correction of Super-resolution Lithography Based on Level Set Algorithm
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US120789372024Near-field Lithography Immersion System, Immersion Unit and Interface Module Thereof
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites - US116933202023Secondary Imaging Optical Lithography Method and Apparatus
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites