Patents/Inventors

Changsoon Lim

Hwaseong-siKR3 patents

3 Patents

US124313412025
Apparatus for Arcing Diagnosis, Plasma Process Equipment Including the Same, and Arcing Diagnosis Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US120875502024
Device for Measuring Density of Plasma, Plasma Processing System, and Semiconductor Device Manufacturing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US119406202024
Method of Cleaning Collector of EUV Light Source System
Samsung Electronics Co., Ltd.
0 cites