Changle Guan

3 Patents

• US126032562026

  Conductive Member for Cleaning Focus Ring of a Plasma Processing Apparatus

  Mattson Technology, Inc.

  0 cites
• US123476612025

  Pressure Control System for a Multi-head Processing Chamber of a Plasma Processing Apparatus

  Mattson Technology, Inc.

  0 cites
• US120091842024

  Lift Pin Assembly for a Plasma Processing Apparatus

  Mattson Technology, Inc.

  0 cites