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Changheon Lee
Seongnam-si
KR
1 patent
2 Patents
US12615781
2026
Semiconductor Device and Electronic System the Same
Samsung Electronics Co., Ltd.
0 cites
US12494352
2025
Plasma Confinement Ring, Semiconductor Manufacturing Apparatus Including the Same, and Method of Manufacturing a Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites