Patents/Inventors

Changgong Wang

San Jose, CAUS2 patents

3 Patents

US121691632024
Detection of Surface Particles on Chamber Components with Carbon Dioxide
Applied Materials, Inc.
0 cites
US120947162024
Chambers and Coatings for Reducing Backside Damage
Applied Materials, Inc.
0 cites
US118154362023
Detection of Surface Particles on Chamber Components with Carbon Dioxide
Applied Materials, Inc.
0 cites