Patents/Inventors

Chang Suk Oh

Chungcheongnam-doKR2 patents

3 Patents

US121241692024
Nozzle Standby Port, Apparatus for Treating Substrate Including the Same and Method for Cleaning Nozzle Using the Same
SEMES CO., Ltd.
0 cites
US120558662024
Cleaning Jig, Substrate Treating Apparatus Including the Same, Cleaning Method of Substrate Treating Apparatus
Semes Co., Ltd.
0 cites
US118450902023
Nozzle Apparatus, Apparatus and Method for Treating Substrate
SEMES CO., Ltd.
0 cites