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Inventors
Chandra Venkatraman
Tyngsboro, MA
US
3 patents
4 Patents
US12444636
2025
Electrostatic Chuck with a Charge Dissipation Structure
ENTEGRIS, Inc.
0 cites
US12322634
2025
Electrostatic Chuck Prepared by Additive Manufacturing, and Related Methods and Structures
ENTEGRIS, Inc.
0 cites
US12101920
2024
Conductive Polymeric Layers for Charge Dissipation
ENTEGRIS, Inc.
0 cites
US11772127
2023
Methods for Applying a Blanket Polymer Coating to a Substrate
ENTEGRIS, Inc.
0 cites