Chan Young Heo

4 Patents

• US118906392024

  Apparatus for Treating Substrate

  SEMES CO., Ltd.

  0 cites
• US118878662024

  Supercritical Processing Apparatus

  SEMES CO., Ltd.

  0 cites
• US116825772023

  Spin Head, Apparatus and Method for Treating a Substrate Including the Spin Head

  SEMES CO., Ltd.

  0 cites
• US116211592023

  Method for Treating Substrate

  SEMES CO., Ltd.

  0 cites