Patents/Inventors

Chan Myae Myae Soe

Santa Clara, CAUS2 patents

3 Patents

US124513462025
Modulated Atomic Layer Deposition
Lam Research Corporation
0 cites
US120716892024
Trim and Deposition Profile Control with Multi-zone Heated Substrate Support for Multi-patterning Processes
Lam Research Corporation
0 cites
US120401812024
Modulated Atomic Layer Deposition
Lam Research Corporation
0 cites