Patents/Inventors

Carola Blaesing-bangert

KasselDE1 patent

2 Patents

US123531262025
Method and Device for Qualifying a Mask of a Lithography System
Carl Zeiss SMT GmbH
0 cites
US123210912025
Device and Method for Determining Placements of Pattern Elements of a Reflective Photolithographic Mask in the Operating Environment Thereof
Carl Zeiss SMT GmbH
0 cites