13 Patents
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- US123226342025Electrostatic Chuck Prepared by Additive Manufacturing, and Related Methods and Structures
ENTEGRIS, Inc.
0 cites - US122701042025Substrate with Fluorinated Yttrium Coatings, and Methods of Preparing and Using the Substrates
ENTEGRIS, Inc.
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- US120847782024Coatings for Enhancement of Properties and Performance of Substrate Articles and Apparatus
ENTEGRIS, Inc.
0 cites - US120312122024Yttrium Fluoride Films and Methods of Preparing and Using Yttrium Fluoride Films
ENTEGRIS, Inc.
0 cites - US120183822024Coatings for Enhancement of Properties and Performance of Substrate Articles and Apparatus
ENTEGRIS, Inc.
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- US117135042023Chemical Resistant Multi-layer Coatings Applied by Atomic Layer Deposition
ENTEGRIS, Inc.
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