18 Patents
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- US122760232025Showerhead Assembly for Distributing a Gas Within a Reaction Chamber
ASM IP Holding B.V.
0 cites - US122472862025Heater Assembly Including Cooling Apparatus and Method of Using Same
ASM IP Holding B.V.
0 cites - US121632252024Temperature-controlled Chemical Delivery System and Reactor System Including Same
ASM IP Holding B.V.
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- US119396732024Apparatus for Detecting or Monitoring for a Chemical Precursor in a High Temperature Environment
ASM IP Holding B.V.
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- US117421892023Multi-zone Reactor, System Including the Reactor, and Method of Using the Same
ASM IP Holding B.V.
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- US116263132023Apparatus and Methods for Isolating a Reaction Chamber from a Loading Chamber Resulting in Reduced Contamination
ASM IP HOLDING B.V.
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