3 Patents
- US123621492025Film Stress Control for Plasma Enhanced Chemical Vapor Deposition
Applied Materials, Inc.
0 cites - US123126892025Large-area High-density Plasma Processing Chamber for Flat Panel Displays
APPLIED MATERIALS, Inc.
0 cites - US118547712023Film Stress Control for Plasma Enhanced Chemical Vapor Deposition
APPLIED MATERIALS, Inc.
0 cites