Patents/Inventors

Byunghwan Kong

Uiwang-siKR3 patents

3 Patents

US125842152026
Apparatus for Manufacturing Semiconductor Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122305142025
Substrate Processing Apparatus Including Filling Gas Supply Line and Substrate Processing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117156532023
Substrate Processing Apparatus
Samsung Electronics Co., Ltd.
0 cites