Byung Seok Kwon

3 Patents

• US121365492024

  Plasma-enhanced Chemical Vapor Deposition of Carbon Hard-mask

  APPLIED MATERIALS, Inc.

  0 cites
• US118307062023

  Heated Pedestal Design for Improved Heat Transfer and Temperature Uniformity

  Applied Materials, Inc.

  0 cites
• US115606232023

  Methods of Reducing Chamber Residues

  Applied Materials, Inc.

  0 cites