Byeong Il Yang

3 Patents

• US123984592025

  Silicon Metal Oxide Encapsulation Film Comprising Metal or Metal Oxide in Thin Film, and Manufacturing Method Therefor

  DNF CO., Ltd

  0 cites
• US122550752025

  Atomic Layer Etching Method Using Ligand Exchange Reaction

  Merck Patent GmbH

  0 cites
• US119011912024

  Atomic Layer Etching Method and Semiconductor Device Manufacturing Method Using the Same

  DNF Co., Ltd.

  0 cites