23 Patents
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- US123476722025Silicon Precursor Compounds and Method for Forming Silicon-containing Films
ENTEGRIS, Inc.
0 cites - US123126782025Methods for Depositing a Tungsten or Molybdenum Layer in the Presence of a Reducing Co-reactant
ENTEGRIS, Inc.
0 cites - US122643922025Silicon Precursor Compounds and Method for Forming Silicon-containing Films
ENTEGRIS, Inc.
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- US122371702025Haloalkynyl Dicobalt Hexacarbonyl Precursors for Chemical Vapor Deposition of Cobalt
ENTEGRIS, Inc.
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- US120847782024Coatings for Enhancement of Properties and Performance of Substrate Articles and Apparatus
ENTEGRIS, Inc.
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- US120183822024Coatings for Enhancement of Properties and Performance of Substrate Articles and Apparatus
ENTEGRIS, Inc.
0 cites - US119878782024Chemical Vapor Deposition Processes Using Ruthenium Precursor and Reducing Gas
ENTEGRIS, Inc.
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- US118043752023Haloalkynyl Dicobalt Hexacarbonyl Precursors for Chemical Vapor Deposition of Cobalt
ENTEGRIS, Inc.
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- US117464132023Chemical Delivery System and Method of Operating the Chemical Delivery System
ENTEGRIS, Inc.
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- US115606252023Vapor Deposition of Molybdenum Using a Bis(alkyl-arene) Molybdenum Precursor
ENTEGRIS, Inc.
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