7 Patents
- 0 cites
- US124009022025Carrier Ring Designs for Controlling Deposition on Wafer Bevel/edge
Lam Research Corporation
0 cites - US123385312025Spatially Tunable Deposition to Compensate Within Wafer Differential Bow
Lam Research Corporation
0 cites - 0 cites
- US119461422024Spatially Tunable Deposition to Compensate Within Wafer Differential Bow
Lam Research Corporation
0 cites - US118374952023Carrier Ring Designs for Controlling Deposition on Wafer Bevel/edge
Lam Research Corporation
0 cites - US118307592023Carrier Ring Designs for Controlling Deposition on Wafer Bevel/edge
Lam Research Corporation
0 cites