24 Patents
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- US124008812025Apparatus and Method of Substrate Edge Cleaning and Substrate Carrier Head Gap Cleaning
Applied Materials, Inc.
0 cites - US123438402025Control of Processing Parameters for Substrate Polishing with Substrate Precession
Applied Materials, Inc.
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- US122241862025Apparatus and Method of Brush Cleaning Using Periodic Chemical Treatments
Applied Materials, Inc.
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- US121989442025Substrate Handling in a Modular Polishing System with Single Substrate Cleaning Chambers
Applied Materials, Inc.
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- US119318532024Control of Processing Parameters for Substrate Polishing with Angularly Distributed Zones Using Cost Function
Applied Materials, Inc.
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- US118970792024Low-temperature Metal CMP for Minimizing Dishing and Corrosion, and Improving Pad Asperity
Applied Materials, Inc.
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- US118239162023Apparatus and Method of Substrate Edge Cleaning and Substrate Carrier Head Gap Cleaning
Applied Materials, Inc.
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